· Value evaluation
　　　· Performance evaluation
　　　· Equipment recovering feasibility evaluation

　　　· Equipment refurbishment

　　　· Machine installation

　　　· Performance test and comment

　　　· Equipment status adjustment and functions recovering

　　　· Accuracy adjustment and recovering

　　　· Equipment refurbishment

　　　· power supplying system Refurbishment: 110<－· －· >220

　　　· Wafer handling system Refurbishment, 4'、5'、6'、8'、-3'、4'、5'、6'

　　　· Pre-Alignment mode Refurbishment : Notch <－· －· > Flat , Transparent and half- Transparent wafers Refurbishment

　　　· Wafer table Refurbishment: 4'、5'、6'、8'<-->3'、4'、5'、6'

　　　· Reticle Alignment Refurbishment

　　　· Computer System Refurbishment （ details ）